Modular Systems & Standard Series
Pre-engineered, modular and configurable systems for faster delivery, proven performance and project-specific configuration.
Thermal System Packages
- Thermal plates
- Cryogenic shrouds
- LN₂ / GN₂ systems
- Temperature control
Vacuum System Packages
- Turbomolecular & backing pumps
- Valves & vacuum components
- Pressure instrumentation
- Vacuum control & protection

Standard Chamber Concepts
- T Series (cubic)
- C Series (cylindrical)
- Multiple volume classes
- Modular options & interfaces










