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    In detail / Vacuum & cleanliness

    Heated Chamber Walls (Bake-out)

    Heating of the inner surfaces to accelerate outgassing

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    Heated Chamber Walls (Bake-out)

    Integrated wall heating raises the temperature of the inner surfaces to accelerate outgassing of adsorbed water and contaminants. This shortens pump-down times and improves the achievable vacuum quality.

    Purpose

    Heating of the inner surfaces to accelerate outgassing

    Benefits
    • Reduced pump-down time
    • Improved vacuum purity

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